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Proceedings Paper

High-speed ellipsometry for the production of thin metal layers
Author(s): Horst Schwiecker; Bui Dang Doi; Pham Thi Thanh Ha; J. Zilian; Ulrich Schneider; Joerg Heland
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Paper Abstract

A new ellipsometer concept is presented for which no polarizing optical components in the conventional sense and no moveable elements are necessary. With four beam splitters and four detectors, four intensities are measured. These data are needed to obtain all four Stokes parameters S0, S1, 2, S3 of the Stokes vector and so the general state of polarization of the radiation. It is shown that it is possible to determine the `optical instrument matrix' A and the `general instrument matrix' B, characterizing the whole measuring system theoretically and experimentally. The results of ex- and in-situ measurements verify the accuracy of this measuring principle. Applying suitable electronics the ellipsometer can be used as a high speed measuring device for (Psi) and (Delta) . Therefore, it is especially useful for real-time ellipsometry to analyze dynamic processes at surfaces and thin films.

Paper Details

Date Published: 11 December 1992
PDF: 9 pages
Proc. SPIE 1746, Polarization Analysis and Measurement, (11 December 1992); doi: 10.1117/12.138792
Show Author Affiliations
Horst Schwiecker, TFH Berlin (Germany)
Bui Dang Doi, Institute for Physics (Vietnam)
Pham Thi Thanh Ha, Institute for Physics (Vietnam)
J. Zilian, Duennschicht Technik (Germany)
Ulrich Schneider, Duennschicht Technik (Germany)
Joerg Heland, Physikalisches Institut der Univ. Giessen (Germany)

Published in SPIE Proceedings Vol. 1746:
Polarization Analysis and Measurement
Dennis H. Goldstein; Russell A. Chipman, Editor(s)

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