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Proceedings Paper

Evaluation of the Schwarzschild x-ray microscope using the compact SR-ring 'AURORA'
Author(s): Shin Masui; Shouichirou Mochimaru; Norio Watanabe; Yoshiaki Horikawa; Hironari Yamada; Hiroshi Kihara
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Paper Abstract

Using the compact SR-ring `AURORA,' imaging performance of the soft x-ray microscope with a Schwarzschild objective were evaluated. The multilayer mirrors of the objective were designed at a wavelength of 135 angstroms with 41 layers of Mo/Si. X rays from the source were filtered with a Be membrane (1.5 micrometers thickness), and then focused on a sample with a paraboloidal condenser. Visible and UV light was removed with the Be filter, and hard x ray was removed with the condenser. X rays transmitted through the sample were imaged on a detector (micro-channel plate) with the Schwarzschild objective. The image was converted to visible light by a fluorescent screen, and monitored with a CCD camera. Magnified ratio was 200. Spatial resolution was evaluated as 0.3 - 0.45 micrometers from an edge response.

Paper Details

Date Published: 13 January 1993
PDF: 10 pages
Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); doi: 10.1117/12.138723
Show Author Affiliations
Shin Masui, Sumitomo Heavy Industrials Ltd. (Japan)
Shouichirou Mochimaru, Olympus Optical Co., Ltd. (Japan)
Norio Watanabe, Nagoya Univ. (Japan)
Yoshiaki Horikawa, Olympus Optical Co., Ltd. (Japan)
Hironari Yamada, Sumitomo Heavy Industrials Ltd. (Japan)
Hiroshi Kihara, Jichi Medical School (Japan)


Published in SPIE Proceedings Vol. 1741:
Soft X-Ray Microscopy
Chris J. Jacobsen; James E. Trebes, Editor(s)

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