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Proceedings Paper

High-performance surface-emitting lasers with dry-etched facets
Author(s): Szutsun Simon Ou; Michael Jansen; Jane J. Yang; Moshe Sergant; Luke J. Mawst; Dan Botez; Thomas J. Roth; Cynthia A. Hess; Chan Tu
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Paper Abstract

The fabrication, performance characteristics, and applications of monolithic in-plane surface-emitting lasers (IPSELs) with dry-etched 45-degree micromirrors are reviewed. Several types of such laser diode structures in both junction-up and junction-down configurations are considered. The performance goals for IPSELs with 45-degree micromirrors are high power and efficiency, high duty cycle and CW operation, good reliability, and high fabrication yields. The proposed approach for achieving these goals includes uniform quantum well material growth and dry etching of the laser micromirrors with tight fabrication tolerances.

Paper Details

Date Published: 2 December 1992
PDF: 11 pages
Proc. SPIE 1703, Optical Technology for Microwave Applications VI and Optoelectronic Signal Processing for Phased-Array Antennas III, (2 December 1992); doi: 10.1117/12.138375
Show Author Affiliations
Szutsun Simon Ou, TRW Space and Technology Group (United States)
Michael Jansen, TRW Space and Technology Group (United States)
Jane J. Yang, TRW Space and Technology Group (United States)
Moshe Sergant, TRW Space and Technology Group (United States)
Luke J. Mawst, TRW Space and Technology Group (United States)
Dan Botez, TRW Space and Technology Group (United States)
Thomas J. Roth, TRW Space and Technology Group (United States)
Cynthia A. Hess, TRW Space and Technology Group (United States)
Chan Tu, TRW Space and Technology Group (United States)


Published in SPIE Proceedings Vol. 1703:
Optical Technology for Microwave Applications VI and Optoelectronic Signal Processing for Phased-Array Antennas III
Shi-Kay Yao; Brian M. Hendrickson, Editor(s)

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