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Proceedings Paper

Thin film diamond temperature sensor array for harsh aerospace environment
Author(s): Mohammad Aslam; Ashraf Masood; Ronald J. Fredricks; Mike A. Tamor
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Paper Abstract

The feasibility of using polycrystalline CVD diamond films as temperature sensors in harsh aerospace environment associated with hypersonic flights was tested using patterned diamond resistors, fabricated on flat or curved oxidized Si surfaces, as temperature sensors at temperatures between 20 and 1000 C. In this temperature range, the measured resistance was found to vary over 3 orders of magnitude and the temperature coefficient of resistance to change from 0.017/K to 0.003/K. After an annealing treatment, the resistance change was reproducible within 1 percent on the entire temperature range for short measuring times.

Paper Details

Date Published: 1 July 1992
PDF: 3 pages
Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); doi: 10.1117/12.138121
Show Author Affiliations
Mohammad Aslam, Michigan State Univ. (United States)
Ashraf Masood, Michigan State Univ. (United States)
Ronald J. Fredricks, Research and Technology Institute of West Michigan (United States)
Mike A. Tamor, Ford Motor Co. (United States)

Published in SPIE Proceedings Vol. 1694:
Sensors and Sensor Systems for Guidance and Navigation II
Sharon S. Welch, Editor(s)

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