Share Email Print
cover

Proceedings Paper

Ferroelectric thin film materials, structures, and microsensors
Author(s): Dennis L. Polla; T. Tamagawa; Chian-Ping Ye; P. J. Schiller; Linda Pham; Cuong Y. Tu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The paper describes the integration of sol-gel ferroelectric thin films into micromachined sensors and optical detectors, devices which are based on the piezoelectric and pyroelectric effects in Pb(Zr(x)Ti(1-x))O3 and PbTiO3 thin films, respectively. The ferroelectric and surface-micromachining technologies are described, which are compatible with 3-micron CMOS technology. At 297 K and a chopping frequency of 50 Hz, the measured blackbody voltage responsivity of a pyroelectric element with an active area of 7 x 10 exp -4 sq cm was 4.2 x 10 exp 4 V/W and the measured normalized detectivity was 1.0 x 10 exp 9 cm sq-rt Hz/W.

Paper Details

Date Published: 1 July 1992
PDF: 11 pages
Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); doi: 10.1117/12.138119
Show Author Affiliations
Dennis L. Polla, Univ. of Minnesota/Twin Cities (United States)
T. Tamagawa, Univ. of Minnesota/Twin Cities (United States)
Chian-Ping Ye, Univ. of Minnesota/Twin Cities (United States)
P. J. Schiller, Univ. of Minnesota/Twin Cities (United States)
Linda Pham, Univ. of Minnesota/Twin Cities (United States)
Cuong Y. Tu, Univ. of Minnesota/Twin Cities (United States)


Published in SPIE Proceedings Vol. 1694:
Sensors and Sensor Systems for Guidance and Navigation II
Sharon S. Welch, Editor(s)

© SPIE. Terms of Use
Back to Top