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Proceedings Paper

Microfabricated magnetometer using Young's modulus changes in magnetoelastic materials
Author(s): Ralph C. Fenn; Michael J. Gerver; Richard L. Hockney; Bruce G. Johnson; John L. Wallace
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Paper Abstract

Recent advances in tunneling-tip technology, magnetic materials, and microfabrication techniques allow development of a new class of improved magnetometers. The sensor utilizes changes in Young's modulus of amorphous magnetic alloys resulting from their excellent magnetoelastic properties. Changes in applied magnetic field cause resonant frequency changes of a sputtered, electrostatically excited Metglass cantilever. Resonant cantilever position is measured by a second, electrostatically controlled cantilever holding a tunneling-tip that tracks the Metglas cantilever. The phase relationship between the exciting signal and the position is fed back to maintain the excitation frequency at the moving resonant peak. In this way the resonant frequency is measured, and the field is inferred from the frequency. The 'Q' of the Metglas cantilever is increased to very high levels using closed loop control of cantilever dynamics, producing extraordinary resolution.

Paper Details

Date Published: 1 July 1992
PDF: 12 pages
Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); doi: 10.1117/12.138115
Show Author Affiliations
Ralph C. Fenn, SatCon Technology Corp. (United States)
Michael J. Gerver, SatCon Technology Corp. (United States)
Richard L. Hockney, SatCon Technology Corp. (United States)
Bruce G. Johnson, SatCon Technology Corp. (United States)
John L. Wallace, Centro de Investigacion y de Estudios Avanzados del I.P.N. (Mexico)


Published in SPIE Proceedings Vol. 1694:
Sensors and Sensor Systems for Guidance and Navigation II
Sharon S. Welch, Editor(s)

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