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Proceedings Paper

CCD modeling and design for enhanced-UV response
Author(s): William G. America; Robert J. Noll; Enrique Garcia; Robert M. Dixon; Richard R. Poole; James Murphy
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Paper Abstract

A model of back illuminated CCDs is presented that concentrates on the fields that can exist at or near the illuminated surface. The parameters that influence these fields and how they affect the device quantum efficiency are explored. We also present a design for a thinned CCD using ion implantation and KrF excimer laser anneal that is tuned for enhanced UV response.

Paper Details

Date Published: 28 August 1992
PDF: 12 pages
Proc. SPIE 1693, Surveillance Technologies II, (28 August 1992); doi: 10.1117/12.138077
Show Author Affiliations
William G. America, Hughes Danbury Optical Systems, Inc. (United States)
Robert J. Noll, Hughes Danbury Optical Systems, Inc. (United States)
Enrique Garcia, Hughes Danbury Optical Systems, Inc. (United States)
Robert M. Dixon, Hughes Danbury Optical Systems, Inc. (United States)
Richard R. Poole, Hughes Danbury Optical Systems, Inc. (United States)
James Murphy, Hughes Danbury Optical Systems, Inc. (United States)


Published in SPIE Proceedings Vol. 1693:
Surveillance Technologies II
Sankaran Gowrinathan; James F. Shanley, Editor(s)

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