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Proceedings Paper

YBa2Cu307 superconducting microbolometer linear arrays
Author(s): Burgess R. Johnson; Thomas R. Ohnstein; Holly A. Marsh; Scott B. Dunham; Paul W. Kruse
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Paper Abstract

Single pixels and linear arrays of microbolometers employing the high-Tc superconductor YBa2Cu3O7 have been fabricated by silicon micromachining techniques. The substrates are 3 in. diameter silicon wafers upon which buffer layers of Si3N4 and yttria-stabilized zirconia (YSZ) have been deposited. The YBa2Cu3O7 was deposited by ion beam sputtering upon the yttria-stabilized zirconia (YSZ), then photolithographically patterned into serpentines 4 micrometers wide. Anisotropic etching in KOH removed the silicon underlying each pixel, thereby providing the necessary thermal isolation. When operated at 70 degree(s)K with 1 (mu) A dc bias, the D* is 7.5 X 108 cm Hz1/2/Watt with a thermal response time of 24 msec.

Paper Details

Date Published: 1 September 1992
PDF: 7 pages
Proc. SPIE 1685, Infrared Detectors and Focal Plane Arrays II, (1 September 1992); doi: 10.1117/12.137815
Show Author Affiliations
Burgess R. Johnson, Honeywell Sensor and System Development Ctr. (United States)
Thomas R. Ohnstein, Honeywell Sensor and System Development Ctr. (United States)
Holly A. Marsh, Honeywell Sensor and System Development Ctr. (United States)
Scott B. Dunham, Honeywell Sensor and System Development Ctr. (United States)
Paul W. Kruse, Honeywell Sensor and System Development Ctr. (United States)


Published in SPIE Proceedings Vol. 1685:
Infrared Detectors and Focal Plane Arrays II
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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