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Proceedings Paper

Electrolyte electroreflectance spectroscopies for the ion-implanted HgCdTe with thermal annealing
Author(s): Shi-Chen Chao; Gwo-Jen Jan; Kuo-Tung Hsu; Feng-Yuh Juang; Tin-Fung Chang; Jia-Song Wu
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Paper Abstract

Electrolyte electroreflectance (EER) is used to investigate the near surface properties of HgCdTe. We used the technique of EER coupled with electrochemical etching. Annealing of B ion-implanted HgCdTe with ZnS encapsulation and anode sulfide film is studied. The results of fitting parameters show that a highly disordered surface layer exists after implantation, and an obvious recovery occurs after the sample is annealed at 200 degree(s)C. It also shows that there are no obvious improvements when the sample is annealed at 300 degree(s)C. The sample encapped with CdS film is better than uncapped CdS film. We found that the composition of Cd at the surface changes due to the chemical interaction of anode sulfide film. It also shows that the sulfide active CdS film can improve the adherence of ZnS to the MCT substrate and make the sample more stable.

Paper Details

Date Published: 1 September 1992
PDF: 8 pages
Proc. SPIE 1685, Infrared Detectors and Focal Plane Arrays II, (1 September 1992); doi: 10.1117/12.137793
Show Author Affiliations
Shi-Chen Chao, National Taiwan Univ. (Taiwan)
Gwo-Jen Jan, National Taiwan Univ. (Taiwan)
Kuo-Tung Hsu, National Taiwan Univ. (Taiwan)
Feng-Yuh Juang, Chung-Shan Institute of Science and Technology (Taiwan)
Tin-Fung Chang, Chung-Shan Institute of Science and Technology (Taiwan)
Jia-Song Wu, Chung-Shan Institute of Science and Technology (Taiwan)

Published in SPIE Proceedings Vol. 1685:
Infrared Detectors and Focal Plane Arrays II
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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