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Proceedings Paper

Producibility of uncooled IRFPA detectors
Author(s): Robert A. Owen; Steve N. Frank; Chuck Daz
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Paper Abstract

Demonstrated detectivity of uncooled infrared focal plane arrays is better than O.1°K noise equivalent temperature difference, Uncooled performance levels are now suitable for military and commercial applications. The manufacturing science of this technology lags that for mercury cadmium tellurium based cooled focal planes. The manufacturing issues and approaches for ferroelectric material based uncooled detectors are discussed. The recommended approach is to address producibility issues based on pareto analysis of the process flow and to address the most highly leveraged process steps in terms of time and labor input. Detailed modeling of the process flow has been undertaken as a part of this analysis. Processes addressed in detail are lap and polish of the detector, photolithography, metallization, etches, hybridization, and test. Several approaches are shown to yield comparable cost focal planes, but a process technology leveraging silicon process technologies is shown to minimize space and equipment.

Paper Details

Date Published: 12 August 1992
PDF: 7 pages
Proc. SPIE 1683, Infrared Focal Plane Array Producibility and Related Materials, (12 August 1992); doi: 10.1117/12.137780
Show Author Affiliations
Robert A. Owen, Texas Instruments Inc. (United States)
Steve N. Frank, Texas Instruments Inc. (United States)
Chuck Daz, Texas Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 1683:
Infrared Focal Plane Array Producibility and Related Materials
Raymond S. Balcerak; Paul W. Pellegrini; Dean A. Scribner, Editor(s)

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