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Proceedings Paper

Compact and high-speed ellipsometer
Author(s): Akira Kazama; Yoshiro Yamada; Takeo Yamada; Takahiko Oshige; Tomoyuki Kaneko; Akio Nagamune
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Paper Abstract

A compact and high-speed ellipsometer system with a new ellipsometric analyzer has been developed. Its size is 130 X 65 X 25 mm, and the weight 400 g including a light source and analyzers with no moving part. With an automatic x-(theta) stage, it takes only 20 seconds to obtain an area distribution map of a thin film-thickness on a 8-inch wafer at 2 mm pitch of 6,000 points. Its compactness and high-speed might make it widely applicable to various processes.

Paper Details

Date Published: 14 August 1992
PDF: 6 pages
Proc. SPIE 1681, Optically Based Methods for Process Analysis, (14 August 1992); doi: 10.1117/12.137734
Show Author Affiliations
Akira Kazama, NKK Corp. (Japan)
Yoshiro Yamada, NKK Corp. (Japan)
Takeo Yamada, NKK Corp. (Japan)
Takahiko Oshige, NKK Corp. (Japan)
Tomoyuki Kaneko, NKK Corp. (Japan)
Akio Nagamune, NKK Corp. (Japan)

Published in SPIE Proceedings Vol. 1681:
Optically Based Methods for Process Analysis
David S. Bomse; Harry Brittain; Stuart Farquharson; Jeremy M. Lerner; Alan J. Rein; Cary Sohl; Terry R. Todd; Lois Weyer, Editor(s)

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