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Proceedings Paper

Infrared phase-modulated ellipsometer for in-situ characterization of surfaces and thin films
Author(s): Nadine Blayo; Bernard Drevillon; Razvigor Ossikovski
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Paper Abstract

A new infrared phase modulated ellipsometer (IRPME) is presented here. The polarization phase modulation technique takes advantage of the high frequency modulation (37 kHz) provided by a ZnSe photoelastic modulator. In order to increase the signal to noise ratio, the conventional globar source was superseded by a cascade arc, which emitted intensity corresponds to that of a blackbody at a temperature > 10,000 K. Ellipsometric measurements can be recorded from 700 up to 4000 cm-1 combining photovoltaic InSb and MCT detectors. A monochromator is used to record spectra, with a 2 - 5 cm-1 spectral resolution, depending on the wavelength domain. The signal acquisition and data processing is based on the use of a numerical electronic system. The improvements of both optical and electronic parts of the ellipsometer result in increased performances by more than one order of magnitude. The precision on (Psi) and (Delta) is now approximately equals 0.01 deg., achieving a submonolayer sensitivity.

Paper Details

Date Published: 14 August 1992
PDF: 12 pages
Proc. SPIE 1681, Optically Based Methods for Process Analysis, (14 August 1992); doi: 10.1117/12.137728
Show Author Affiliations
Nadine Blayo, Ecole Polytechnique (France)
Bernard Drevillon, Ecole Polytechnique (France)
Razvigor Ossikovski, Ecole Polytechnique (France)

Published in SPIE Proceedings Vol. 1681:
Optically Based Methods for Process Analysis
David S. Bomse; Harry Brittain; Stuart Farquharson; Jeremy M. Lerner; Alan J. Rein; Cary Sohl; Terry R. Todd; Lois Weyer, Editor(s)

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