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Proceedings Paper

Buried heterostructure formation processes for high-performance devices
Author(s): Alexei V. Syrbou
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Paper Abstract

New AlGaAs buried heterostructure (BH) formation processes based on low temperature (T < 600 degree(s)C) in-situ mesa melt-etching and liquid phase epitaxial (LPE) regrowth have been studied and applied to the fabrication of BH laser diodes. It was shown that the BH formation process on AlxGa1-xAs laser structures with x equals 0.2...0.5 of cladding layers and masking stripes oriented along [011] or [011] on (100) planes depends on melt-etching rate anisotropy, while in a similar process for x > 0.6, or masking stripe orientations other than [011] or [011] the most important factors is the melt-etching material selectivity. Difficult AlGaAs nucleation on A-type planes is a distinct feature of LPE regrowth at temperatures lower than 600 degree(s)C. Low temperature melt-etching and regrowth produced single mode AlGaAs BH laser diodes emitting at 800 nm with the maximum optical power of 120 mW at 106 mA.

Paper Details

Date Published: 2 September 1992
PDF: 6 pages
Proc. SPIE 1676, Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication, (2 September 1992); doi: 10.1117/12.137651
Show Author Affiliations
Alexei V. Syrbou, Kishinev Polytechnic Institute (Moldova)

Published in SPIE Proceedings Vol. 1676:
Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication

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