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Proceedings Paper

Evaluation of photolithographic processes for high-density optical disc mastering
Author(s): Paul L.M. Put; P. A. Kraakman; Robert D. Morton; Jan H.T. Pasman
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Paper Abstract

An investigation into the fundamental properties of the photolithographic optical disc mastering process is presented. It is shown that, despite the extreme differences in processing conditions, some of the models used in IC-lithography are valid for this process. This opens the possibility of introducing some of the techniques for resolution enhancement, proposed in IC-lithography, into the optical disc mastering process.

Paper Details

Date Published: 13 August 1992
PDF: 13 pages
Proc. SPIE 1663, Optical Data Storage, (13 August 1992); doi: 10.1117/12.137559
Show Author Affiliations
Paul L.M. Put, Philips Research Labs. (Netherlands)
P. A. Kraakman, Philips Research Labs. (Netherlands)
Robert D. Morton, Philips Research Labs. (Netherlands)
Jan H.T. Pasman, Optical Disc Manufacturing Equipment B.V. (Netherlands)


Published in SPIE Proceedings Vol. 1663:
Optical Data Storage
Donald B. Carlin; David B. Kay; Alfred A. Franken, Editor(s)

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