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Proceedings Paper

Evaluation of a laser-based proximity x-ray stepper
Author(s): George K. Celler; John Frackoviak; Richard R. Freeman; Charles W. Jurgensen; R. R. Kola; Anthony E. Novembre; Larry F. Thompson; Lee E. Trimble; David N. Tomes
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Paper Abstract

Preliminary evaluation of a 1:1 proximity x-ray stepper, built by Hampshire Instruments is discussed here. This stepper, model 5000P, is the first commercial system that uses a laser- generated plasma x-ray source. It was extensively tested at the supplier's facility and in July 1991 it was shipped to AT&T Bell Labs, where its installation is nearly completed.

Paper Details

Date Published: 9 July 1992
PDF: 5 pages
Proc. SPIE 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II, (9 July 1992); doi: 10.1117/12.136015
Show Author Affiliations
George K. Celler, AT&T Bell Labs. (United States)
John Frackoviak, AT&T Bell Labs. (United States)
Richard R. Freeman, AT&T Bell Labs. (United States)
Charles W. Jurgensen, AT&T Bell Labs. (United States)
R. R. Kola, AT&T Bell Labs. (United States)
Anthony E. Novembre, AT&T Bell Labs. (United States)
Larry F. Thompson, AT&T Bell Labs. (United States)
Lee E. Trimble, AT&T Bell Labs. (United States)
David N. Tomes, Hampshire Instruments, Inc. (United States)

Published in SPIE Proceedings Vol. 1671:
Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II
Martin C. Peckerar, Editor(s)

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