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Proceedings Paper

Epitaxial growth of p+ silicon on a backside-thinned CCD for enhanced UV response
Author(s): Michael E. Hoenk; Paula J. Grunthaner; Frank J. Grunthaner; Robert W. Terhune; Masoud M. Fattahi
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Paper Details

Date Published: 12 August 1992
PDF: 9 pages
Proc. SPIE 1656, High-Resolution Sensors and Hybrid Systems, (12 August 1992); doi: 10.1117/12.135951
Show Author Affiliations
Michael E. Hoenk, Jet Propulsion Lab. (United States)
Paula J. Grunthaner, Jet Propulsion Lab. (United States)
Frank J. Grunthaner, Jet Propulsion Lab. (United States)
Robert W. Terhune, Jet Propulsion Lab. (United States)
Masoud M. Fattahi, EG&G Reticon (United States)


Published in SPIE Proceedings Vol. 1656:
High-Resolution Sensors and Hybrid Systems
Morley M. Blouke; Winchyi Chang; Laurence J. Thorpe; Rajinder P. Khosla, Editor(s)

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