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Proceedings Paper

Accuracy of phase-shifting interferometry: phase-shifter calibration and error compensation
Author(s): Rihong Zhu; Jinbang Chen; Lei Chen; Liandu Liu; Mingyi Chen
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Paper Abstract

The accuracy of phase shifting interferometers is impaired by mechanical drifts and vibrations, intensity variations, nonlinearities of the photoelectric detection device, and, most seriously, by inaccuracies of the reference phase shifter. This paper presents a new method to correct the phase shifter by using an iterative process relying on the carrier fringes and the Fourier transform algorithm to analyze the carrier fringes. The phase shifter inaccuracies can be displayed by a special Lissajous display technique.

Paper Details

Date Published: 1 January 1992
PDF: 9 pages
Proc. SPIE 1553, Laser Interferometry IV: Computer-Aided Interferometry, (1 January 1992); doi: 10.1117/12.135355
Show Author Affiliations
Rihong Zhu, East China Institute of Technology (China)
Jinbang Chen, East China Institute of Technology (China)
Lei Chen, East China Institute of Technology (China)
Liandu Liu, East China Institute of Technology (China)
Mingyi Chen, Shanghai Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 1553:
Laser Interferometry IV: Computer-Aided Interferometry
Ryszard J. Pryputniewicz, Editor(s)

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