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Proceedings Paper

Calibration of profilometer transmission characteristics with heterodyne interferometry (Proceedings Only)
Author(s): Pengsheng Li; Hua Li; Zuo Zhang
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Paper Abstract

A method of calibrating profilometer transmission characteristics with a heterodyne interferometer is described. This method has the advantages of high precision, setting no strict demands on the environment and being efficient. The work range of the calibrating system is from 0.15 micrometers to 40 micrometers for Ra. The uncertainty of the calibrating is +/- 1%, and the frequency is between 1 Hz and 180 Hz.

Paper Details

Date Published: 1 January 1992
PDF: 4 pages
Proc. SPIE 1553, Laser Interferometry IV: Computer-Aided Interferometry, (1 January 1992); doi: 10.1117/12.135347
Show Author Affiliations
Pengsheng Li, Harbin Institute of Technology (China)
Hua Li, Harbin Institute of Technology (China)
Zuo Zhang, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 1553:
Laser Interferometry IV: Computer-Aided Interferometry
Ryszard J. Pryputniewicz, Editor(s)

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