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Proceedings Paper

High-resolution differential phase and amplitude optical microscope
Author(s): Sergei I. Bozhevolnyi; A. V. Postnikov; P. S. Radko
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Paper Abstract

A differential phase and amplitude scanning optical microscope for simultaneous and independent detecting variations in surface relief and sample reflectivity is described. Results of surface studies of thin metal layers deposited on Si-wafers are presented. The3depth resolution of 2 A and reflectivity variation sensitivity of 5•lO with the spatial resolution of 2.5 mm are achieved.

Paper Details

Date Published: 1 February 1992
PDF: 6 pages
Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); doi: 10.1117/12.134900
Show Author Affiliations
Sergei I. Bozhevolnyi, Institute of Microelectronics (Russia)
A. V. Postnikov, Institute of Microelectronics (Russia)
P. S. Radko, Institute of Microelectronics (Russia)

Published in SPIE Proceedings Vol. 1556:
Scanning Microscopy Instrumentation
Gordon S. Kino, Editor(s)

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