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Proceedings Paper

Microinterferometry to 1 pm (Invited Paper)
Author(s): Winfried Denk
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Paper Abstract

Measurement of small displacements using interferometry and optical microscopy of transparent phase objects are both well established techniques. Somehow missing, however, is the combination of the interferometry's temporal resolution and displacement sensitivity with the resolving power (and hence ability to spatially discriminate) of high numerical aperture optical microscopy. This paper outlines the design of such an instrument as well as the theory of its operation. The details of both are described in Applied Optics, 29, 2383-91 where relevant references can be found.

Paper Details

Date Published: 1 February 1992
PDF: 3 pages
Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); doi: 10.1117/12.134893
Show Author Affiliations
Winfried Denk, AT&T Bell Labs. (Germany)

Published in SPIE Proceedings Vol. 1556:
Scanning Microscopy Instrumentation
Gordon S. Kino, Editor(s)

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