Share Email Print
cover

Proceedings Paper

Metrics for metrology on an atomic scale (Abstract Only)
Author(s): E. Clayton Teague
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The focus of this paper is on the principal means of realizing a metric appropriate for atomic scale metrology. These are evaluated to determine the systematic uncertainties involved in relating sensed displacements to the international standard of length.

Paper Details

Date Published: 1 February 1992
PDF: 2 pages
Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); doi: 10.1117/12.134887
Show Author Affiliations
E. Clayton Teague, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 1556:
Scanning Microscopy Instrumentation
Gordon S. Kino, Editor(s)

© SPIE. Terms of Use
Back to Top