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Proceedings Paper

Near-field acoustic microscopy (Invited Paper)
Author(s): Butrus T. Khuri-Yakub; S. Akamine; B. Hadimioglu; Hidenori Yamada; Calvin F. Quate
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Paper Abstract

We have integrated silicon micromachining techniques with piezoelectric thin film deposition to make a near-field acoustic microscope. A piezoelectric zinc oxide (ZnO) transducer is deposited on a substrate of 7740 glass. A sharp tip is formed in a silicon wafer which is anodically bonded to the glass substrate. A sample is attached to substrate of glass with a receiving ZnO transducer. The transducer on the tip excites an ultrasonic beam which passes from the tip to the sample and is detected by the receiving transducer. A feedback signal is generated to keep the transmitted amplitude constant as a sample is raster scanned. The feedback signal is applied to a tube scanner and is also used to modulate the intensity of a display monitor. We find that the instrument has a vertical height sensitivity of about 20 angstroms, and a lateral resolution of better than 800 angstroms.

Paper Details

Date Published: 1 February 1992
PDF: 10 pages
Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); doi: 10.1117/12.134885
Show Author Affiliations
Butrus T. Khuri-Yakub, Stanford Univ. (United States)
S. Akamine, Stanford Univ. (United States)
B. Hadimioglu, Xerox/Palo Alto Research Ctr. (United States)
Hidenori Yamada, National Research Lab. of Metrology (Japan)
Calvin F. Quate, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 1556:
Scanning Microscopy Instrumentation
Gordon S. Kino, Editor(s)

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