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Proceedings Paper

Spatial frequency response for an optical profiler
Author(s): R. Anthony Auriemma; Joseph Bietry; Thomas C. Bristow; Gary Wagner
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Paper Abstract

This paper presents a general method for measuring the frequency response of a surface profiling instrument. One important consequence of this work is the discussion of the importance of the modification of surface spatial frequencies by the measuring instrument. The method uses a step height sample to characterize the impulse instrument, and power spectrum response. Experimental measurements are shown for a variety of focusing objectives. The results show that the half power bandwidth provides a good characterization of the high spatial frequency limit of a surface profiler.

Paper Details

Date Published: 1 January 1992
PDF: 9 pages
Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); doi: 10.1117/12.134866
Show Author Affiliations
R. Anthony Auriemma, Chapman Instruments (United States)
Joseph Bietry, Chapman Instruments (United States)
Thomas C. Bristow, Chapman Instruments (United States)
Gary Wagner, Chapman Instruments (United States)


Published in SPIE Proceedings Vol. 1531:
Advanced Optical Manufacturing and Testing II
Victor J. Doherty, Editor(s)

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