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Proceedings Paper

Comparison of optical and mechanical measurements of surface finish
Author(s): Eugene L. Church; Christopher Dainty; David M. Gale; Peter Z. Takacs
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Paper Abstract

The topography of a smooth machined silicon flat has been measured with a phase-shifting Linnik microscope and a Talystep mechanical profilometer and the results compared in the frequency domain. Excellent agreement is found for the strong low-frequency components that determine the gross properties of the surface. Differences observed for some small high- frequency components may have implications for the understanding of microscope imaging properties.

Paper Details

Date Published: 1 January 1992
PDF: 17 pages
Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); doi: 10.1117/12.134865
Show Author Affiliations
Eugene L. Church, U.S. Army Research and Development Command (United States)
Christopher Dainty, Imperial College of Science, Technology and Medicine (United Kingdom)
David M. Gale, Imperial College of Science, Technology and Medicine (United Kingdom)
Peter Z. Takacs, Brookhaven National Lab. (United States)

Published in SPIE Proceedings Vol. 1531:
Advanced Optical Manufacturing and Testing II
Victor J. Doherty, Editor(s)

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