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Proceedings Paper

Profile measurement of concave mirror by a common-path interferometer on ultraprecision machine
Author(s): Kazuo Yoshikawa; Takashi Nomura; Hatsuzo Tashiro; Masane Suzuki; Masao Usuki; Fumio Kobayashi
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Paper Abstract

This paper presents the technique of an on-machine precision profile measurement, through a kind of common-path interferometer using a zone-plate. We could analyze profile errors of a spherical mirror on the machine turning at a speed of 900 rpm. The results of experiments are evaluated.

Paper Details

Date Published: 1 January 1992
PDF: 6 pages
Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); doi: 10.1117/12.134853
Show Author Affiliations
Kazuo Yoshikawa, Toyama Univ. (Japan)
Takashi Nomura, Toyama Prefectural Univ. (Japan)
Hatsuzo Tashiro, Toyama Univ. (Japan)
Masane Suzuki, Nagoya College of Creative Art (Japan)
Masao Usuki, Nachi Fujikoshi Co., Ltd. (Japan)
Fumio Kobayashi, Fuji Photo Optical Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 1531:
Advanced Optical Manufacturing and Testing II
Victor J. Doherty, Editor(s)

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