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Proceedings Paper

Development of the toroidal surface measuring system
Author(s): Hiroyuki Suhara; Nobuo Sakuma; Seizoh Suzuki; T. Ohsawa; Shin Tsuyuzaki; Satoru Toyooka
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Paper Abstract

We have developed a toroidal surface measuring interferometer system. One of the key features of our interferometer system is its ability to measure a toroidal surface without a toroidal wave front and a toroidal reference surface. Our optical system consists of a Fizeau interferometer using a spherical wave front. A cross section figure of the test surface is obtained to analyze interference fringes like a striped bar by using the Fourier transform method. We can then connect each cross section over the entire surface figure by rotation of a rotary table. Results of examination show that the accuracy of our measuring system is better than (lambda) /20 P-V.

Paper Details

Date Published: 1 January 1992
PDF: 8 pages
Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); doi: 10.1117/12.134849
Show Author Affiliations
Hiroyuki Suhara, Ricoh Co., Ltd. (Japan)
Nobuo Sakuma, Ricoh Co., Ltd. (Japan)
Seizoh Suzuki, Ricoh Co., Ltd. (Japan)
T. Ohsawa, Ricoh Co., Ltd. (Japan)
Shin Tsuyuzaki, Ricoh Co., Ltd. (Japan)
Satoru Toyooka, Saitama Univ. (Japan)


Published in SPIE Proceedings Vol. 1531:
Advanced Optical Manufacturing and Testing II
Victor J. Doherty, Editor(s)

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