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Proceedings Paper

HOE interferometer for cylindrical surface
Author(s): Yoshitaka Minami; Kenji Yasuda
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Paper Abstract

We have developed a new HOE interferometer for testing cylindrical surfaces. The HOE is a reflection type and a plane mirror is used to compensate irregularity of HOE's surface. The grating pattern on the HOE was calculated by a computer. And the HOE was fabricated by an electron beam lithography system. This HOE acts as a diffraction element of cylindrical wave and also as a reflector of plane wave. The main frame of our HOE interferometer is a commercial Fizeau type interferometer. So operation is very easy.

Paper Details

Date Published: 20 October 1992
PDF: 6 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132180
Show Author Affiliations
Yoshitaka Minami, Fuji Photo Optical Co., Ltd. (Japan)
Kenji Yasuda, Fuji Photo Optical Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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