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Proceedings Paper

Method for measuring small displacements by using an electro-optic modulator
Author(s): Li-Horng Shyu; Chieh-Li Chen; Der-Chin Su
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Paper Abstract

A new method for measuring small displacements is presented. An electro-optic modulator is used to mix a carrier frequency to the reference signal and the test signals. By measuring the phase difference between these two signals, the displacements can be evaluated. It has the same high resolution as the heterodyne interferometer, and can be operated in real-time.

Paper Details

Date Published: 20 October 1992
PDF: 5 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132176
Show Author Affiliations
Li-Horng Shyu, National Chiao Tung Univ. (Taiwan)
Chieh-Li Chen, National Chiao Tung Univ. (Taiwan)
Der-Chin Su, National Chiao Tung Univ. (Taiwan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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