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Proceedings Paper

Calibration of phase-shift interferometer
Author(s): Der-Shen Wan; Wen-Shang Chiang; Ming-Wen Chang
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Paper Abstract

For thin film technology, the thickness of a thin film can be controlled and measured very accurately, which supplies a standard for the calibration of a phase shift interferometer. We use a one-eight wave thin film to calibrate the 90 degree(s) phase shift for a phase shift interferometer. The interferometer is also used to measure the thickness of a thin film for checking its accuracy.

Paper Details

Date Published: 20 October 1992
PDF: 10 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132175
Show Author Affiliations
Der-Shen Wan, Chung-Shan Institute of Science and Technology (Taiwan)
Wen-Shang Chiang, Chung-Shan Institute of Science and Technology (Taiwan)
Ming-Wen Chang, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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