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Proceedings Paper

Advancements in one-dimensional profiling with a long-trace profiler
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Paper Abstract

Over the last several years the long trace profiler (LTP) has been evolving into a sophisticated machine capable of measuring surface profiles of very long dimensions. This report explains improvements, both hardware and software, that have helped to achieve accuracies and ranges in surface profiling that have been unobtainable until now. A comparison made by measuring standard optical surfaces on other instruments corroborates these accuracies.

Paper Details

Date Published: 20 October 1992
PDF: 7 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132173
Show Author Affiliations
Steven C. Irick, Lawrence Berkeley Lab. (United States)
Wayne R. McKinney, Lawrence Berkeley Lab. (United States)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
Jumpei Tsujiuchi, Editor(s)

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