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Proceedings Paper

Calculation of grating transmission functions by determining the spectral intensity
Author(s): Xiangqun Cao; Hong Xie; Ling Chen
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Paper Abstract

In recent years more and more applications are reported for metrology grating, however, almost all the papers were limited to the testing of its accuracy, drift of dc level, and phase. As to the testing of its transmission function, nothing more than those theoretical analyses were reported. Therefore, a method for calculation of grating transmission distribution by determining its spectral intensity is described here, and the testing data and calculated results about Ronchi-gratings, sine-gratings, and their replicated gratings are theoretically analyzed and calculated. Some other problems are also discussed in this paper. With the need for technology and application of gratings, it is necessary to explore further in this field.

Paper Details

Date Published: 20 October 1992
PDF: 6 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132172
Show Author Affiliations
Xiangqun Cao, Zhejiang Univ. (China)
Hong Xie, Zhejiang Univ. (China)
Ling Chen, Shanghai Institute of Mechanical Engineering (China)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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