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Proceedings Paper

Estimation of the size parameters of fine rectangular grooves based on Fraunhofer diffraction
Author(s): Takashi Miyoshi; Yasuhiro Takaya
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Paper Abstract

A non-contact measuring method based on Fraunhofer diffraction which can estimate quantitatively the size parameters of fine rectangular grooves with periodic square-wave in cross section is described. The relation between a model of rectangular grooves and diffraction intensity pattern is analyzed theoretically. Equations which can estimate the size parameters of rectangular grooves such as pitch, width, and depth from the diffraction intensity pattern are derived. The numerical analysis of the equations and the computer simulations are performed. In order to verify the validity of the proposed method, the measurement of the size parameters of the rectangular grooves of a high precision grating plate is carried out.

Paper Details

Date Published: 20 October 1992
PDF: 12 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132169
Show Author Affiliations
Takashi Miyoshi, Osaka Univ. (Japan)
Yasuhiro Takaya, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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