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Proceedings Paper

Modern surface technique and its valuation on ultraprecise metrology grating
Author(s): Lin Chen
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Paper Abstract

The new technique on the surface of ultra-precise metrology grating advanced in this paper actually is a type of the process of protective covering for the ruled grating. After discussing the effect of the surface technique on the target of grating homogeneity error, and evaluating three types of the traditional surface techniques, it is evident that the modern surface technique, J-D protective covering, is best in practice.

Paper Details

Date Published: 20 October 1992
PDF: 4 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132164
Show Author Affiliations
Lin Chen, Shanghai Institute of Mechanical Engineering (China)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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