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Proceedings Paper

Fabrication of lenslet grating with multilevel phases
Author(s): Yingbai Yan; Xu Wang; Changkun Yao; Guofan Jin; Minxian Wu
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Paper Abstract

Lenslet arrays with eight-level phases are fabricated by the method of etching and film coating, respectively. The diffraction efficiency of that component is about 80%. Two types of lenslet grating are constructed, the one is a lenslet array with a pinhole grating, and the other is a combination of two sets of lenslet arrays. The homogeneity of the array spots obtained by a lenslet grating is better than that by a single lenslet array. The fabrication process and the testing method are described, some experimental results are listed.

Paper Details

Date Published: 20 October 1992
PDF: 8 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132161
Show Author Affiliations
Yingbai Yan, Tsinghua Univ. (China)
Xu Wang, Tsinghua Univ. (China)
Changkun Yao, Tsinghua Univ. (China)
Guofan Jin, Tsinghua Univ. (China)
Minxian Wu, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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