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Proceedings Paper

Oblique incidence interferometry for gear-tooth surface profiling
Author(s): Tomomi Ino; Toyohiko Yatagai
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Paper Abstract

An oblique incidence interferometer for measuring a non-optical surface of a gear tooth with a phase shifting method is developed. The incidence angle of a He-Ne laser is set to be 84.75 degree(s) with a wedge prism, to obtain fringe spacing corresponding to the height of 3.64 micrometers . The reference beam is piezo-electrically modulated to make phase shifting fringe analysis. A high resolution CCD camera with resolution of 1280 X 1024 is used so that about 200 fringes can be analyzed. The maximum deviation of about 420 micrometers from a plane reference surface is measured with an accuracy of 40 nm.

Paper Details

Date Published: 20 October 1992
PDF: 6 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132156
Show Author Affiliations
Tomomi Ino, Univ. of Tsukuba (Japan)
Toyohiko Yatagai, Univ. of Tsukuba (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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