Share Email Print
cover

Proceedings Paper

Oblique incidence interferometry for gear-tooth surface profiling
Author(s): Tomomi Ino; Toyohiko Yatagai
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

An oblique incidence interferometer for measuring a non-optical surface of a gear tooth with a phase shifting method is developed. The incidence angle of a He-Ne laser is set to be 84.75 degree(s) with a wedge prism, to obtain fringe spacing corresponding to the height of 3.64 micrometers . The reference beam is piezo-electrically modulated to make phase shifting fringe analysis. A high resolution CCD camera with resolution of 1280 X 1024 is used so that about 200 fringes can be analyzed. The maximum deviation of about 420 micrometers from a plane reference surface is measured with an accuracy of 40 nm.

Paper Details

Date Published: 20 October 1992
PDF: 6 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132156
Show Author Affiliations
Tomomi Ino, Univ. of Tsukuba (Japan)
Toyohiko Yatagai, Univ. of Tsukuba (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

© SPIE. Terms of Use
Back to Top