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Proceedings Paper

Measurement of large plane surface shape with interferometric aperture synthesis
Author(s): Masashi Otsubo; Katsuyuki Okada; Jumpei Tsujiuchi
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Paper Abstract

It is difficult to measure the optical surface shape of large area plane using interferometers. A part of the area of the sample is measured repeatedly by using a small aperture interferometer. The connection of the adjacent areas data is made with the aid of the least square method. This paper shows a method of connection of the measurement and shows some results of experiment.

Paper Details

Date Published: 20 October 1992
PDF: 4 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132152
Show Author Affiliations
Masashi Otsubo, Chiba Univ. (Japan)
Katsuyuki Okada, Chiba Univ. (Japan)
Jumpei Tsujiuchi, Chiba Univ. (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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