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Proceedings Paper

Measurement of phase change of light on reflection
Author(s): Takuma Doi; Kouji Toyoda; Yoshihisa Tanimura
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Paper Abstract

A sample consisting of different metals in the same plane is fabricated, and its surface profile is measured by interferometry. In spite of the flat surface, a virtual step height (max. value equals 33 nm) is measured at the boundary of the two adjacent metals. The measured step height corresponds to the difference in the phase change of reflected light between the two metals. From the results, the effect of the phase change on surface profilometry is estimated.

Paper Details

Date Published: 20 October 1992
PDF: 8 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132151
Show Author Affiliations
Takuma Doi, National Research Lab. of Metrology (Japan)
Kouji Toyoda, National Research Lab. of Metrology (Japan)
Yoshihisa Tanimura, National Research Lab. of Metrology (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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