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Proceedings Paper

Heterodyne common-path interferometer for testing surface roughness
Author(s): Changyuan Han; Bin Liu; Zhenwu Lu; Quwu Gu
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Paper Abstract

As a modified heterodyne interferometer the heterodyne common path interferometer for measuring surface roughness is described. The interferometer system adopts the isosceles triangle type common path interferometer in which the reference beam and the measurement beam pass through the same optical path so that the mechanical instability, air turbulence, and temperature variations will affect the same value of the optical path for both the beams. The actual height resolution is 1 angstrom, and the lateral resolution is 1 micrometers . This modified interferometer can use general He-Ne laser which needs no frequency stabilizer and general experimental stage without shockproof.

Paper Details

Date Published: 20 October 1992
PDF: 6 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132149
Show Author Affiliations
Changyuan Han, Changchun Institute of Optics and Fine Mechanics (China)
Bin Liu, Changchun Institute of Optics and Fine Mechanics (China)
Zhenwu Lu, Changchun Institute of Optics and Fine Mechanics (China)
Quwu Gu, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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