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Proceedings Paper

Design, fabrication, and polarization of soft x-ray transmission multilayers
Author(s): Hiroshi Nomura; Kou Mayama; Takuya Sasaki; Masaki Yamamoto; Mihiro Yanagihara
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Paper Abstract

Soft-x-ray transmission multilayers have been designed and fabricated for use as polarizing elements. Polarization performance of the multilayers has been studied at a photon energy of 97 eV by rotating analyzer ellipsometry with a multilayer reflection polarizer. The transmission multilayers were found to be a good polarizer of 99.2% polarizance and a phase shifter of 90 degree(s) retardation with equal transmission ratio (5:3) and high throughput around 10%.

Paper Details

Date Published: 20 October 1992
PDF: 7 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132147
Show Author Affiliations
Hiroshi Nomura, Tohoku Univ. (Japan)
Kou Mayama, Tohoku Univ. (Japan)
Takuya Sasaki, Tohoku Univ. (Japan)
Masaki Yamamoto, Tohoku Univ. (Japan)
Mihiro Yanagihara, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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