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Proceedings Paper

Soft x-ray polarization measurement with a laboratory reflectometer
Author(s): Masaki Yamamoto; Kou Mayama; Hiroshi Nomura; Hiroaki Kimura; Mihiro Yanagihara; Takeshi Namioka
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Paper Abstract

A laboratory reflectometer with a laser produced plasma source and a constant deviation angle monochromator is used as an ellipsometer to evaluate a transmission multilayer phase shifter. With use of the phase shifter, all normalized Stokes parameters of the incident beam to the reflectometer from the monochromator were measured.

Paper Details

Date Published: 20 October 1992
PDF: 5 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132146
Show Author Affiliations
Masaki Yamamoto, Tohoku Univ. (Japan)
Kou Mayama, Tohoku Univ. (Japan)
Hiroshi Nomura, Tohoku Univ. (Japan)
Hiroaki Kimura, Tohoku Univ. (Japan)
Mihiro Yanagihara, Tohoku Univ. (Japan)
Takeshi Namioka, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
Jumpei Tsujiuchi, Editor(s)

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