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Proceedings Paper

Measurement of 2D birefringence distribution
Author(s): Masato Noguchi; Tsuyoshi Ishikawa; Masahiro Ohno; Satoru Tachihara
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Paper Abstract

A new measuring method of 2-D birefringence distribution has been developed. It has not been an easy job to get a birefringence distribution in an optical element with conventional ellipsometry because of its lack of scanning means. Finding an analogy between the rotating analyzer method in ellipsometry and the phase-shifting method in recently developed digital interferometry, we have applied the phase-shifting algorithm to ellipsometry, and have developed a new method that makes the measurement of 2-D birefringence distribution easy and possible. The system contains few moving parts, assuring reliability, and measures a large area of a sample at one time, making the measuring time very short.

Paper Details

Date Published: 20 October 1992
PDF: 12 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132143
Show Author Affiliations
Masato Noguchi, Asahi Optical Co., Ltd. (Japan)
Tsuyoshi Ishikawa, Asahi Optical Co., Ltd. (Japan)
Masahiro Ohno, Asahi Optical Co., Ltd. (Japan)
Satoru Tachihara, Asahi Optical Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
Jumpei Tsujiuchi, Editor(s)

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