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Proceedings Paper

Analysis of zone-plate interference fringe pattern
Author(s): Kazuhide Kamiya; Takashi Nomura; Hiroshi Miyashiro; Kazuo Yoshikawa; Hatsuzo Tashiro; Shigeo Ozono; Masane Suzuki
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Paper Abstract

The zone-plate interference fringe pattern is analyzed by FFT. The spectrum obtained by FFT contains information on the shape error. To select the information on the shape error from the spectrum of the fringe pattern is difficult, because the resolution of the spectrum is low. An FFT with over-sampling is applied to increase the spectrum resolution. A method is proposed to select the necessary information from the spectrum of the fringe pattern. Experimental results obtained by the proposed method agree well with those obtained by Fizeau interferometer.

Paper Details

Date Published: 20 October 1992
PDF: 6 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132138
Show Author Affiliations
Kazuhide Kamiya, Toyama Prefectural Univ. (Japan)
Takashi Nomura, Toyama Prefectural Univ. (Japan)
Hiroshi Miyashiro, Toyama Prefectural Univ. (Japan)
Kazuo Yoshikawa, Toyama Univ. (Japan)
Hatsuzo Tashiro, Toyama Univ. (Japan)
Shigeo Ozono, Univ. of Tokyo (Japan)
Masane Suzuki, Nagoya College of Creative Art (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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