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Proceedings Paper

Two-stage x-ray mirror system for microscopic x-ray photoelectron spectroscopy
Author(s): Ken Ninomiya; Masaki Hasegawa; Sadao Aoki
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Paper Abstract

An x-ray mirror system based on the off-axis configuration of Wolter-type mirrors is built up for microscopic x-ray photoelectron spectroscopy ((mu) -XPS), and its focusing characteristics are evaluated using the MgK(alpha) x rays (1253.6 eV). The focussed beam diameter is 15 - 20 micrometers when the 6 mm diameter x-ray source is used. This indicates that the mirror system has achieved the high demagnification of 1/300 - 1/400 required for (mu) - XPS analysis in the micrometer range. The future performance of (mu) -XPS analysis using a rotating-anode x-ray source is outlined.

Paper Details

Date Published: 20 October 1992
PDF: 6 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132132
Show Author Affiliations
Ken Ninomiya, Hitachi, Ltd. (Japan)
Masaki Hasegawa, Hitachi, Ltd. (Japan)
Sadao Aoki, Univ. of Tsukuba (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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