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Proceedings Paper

Radiation damage of multilayer mirrors for soft x-ray lasers
Author(s): Masami Tsukamoto; Masahito Niibe; Yutaka Watanabe; Akira Miyake; Takashi Iizuka; Yasuaki Fukuda; Yoshiaki Kato; Hiroyuki Shiraga; Hiroyuki Daido; Kensuki Murai; Ciaran L. S. Lewis; David Neely; Domhnail O'Neill
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Paper Abstract

We have successfully demonstrated double pass enhancement of amplified spontaneous emission of soft x rays, 23.2 and 23.6 nm of 3p - 3s transitions in Ne-like Ge, using an x-ray multilayer mirror. In this paper, we report on the fabrication of the mirror and analysis of its damage suffered during the experiments. The mirror used was a Mo-Si multilayer mirror with the reflectivity of 35% at the wavelength of 23.6 nm, deposited by an rf-sputtering system. In the damaged area of the mirror, only the multilayer was locally evaporated and the bare substrate underneath appeared. The size of the damaged area corresponded to the aperture size. We carried out the simulation on the spatial and temporal distribution of the mirror temperature during the experiment. Assuming that thermal x rays enter the mirror with the largest amount of energy among all the fluxes at the early stage of the enhancement, the result of the simulation can explain the damage feature and the temporal profile of the intensity of the amplified spontaneous emissions.

Paper Details

Date Published: 20 October 1992
PDF: 11 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132129
Show Author Affiliations
Masami Tsukamoto, Canon Inc. (Japan)
Masahito Niibe, Canon Inc. (Japan)
Yutaka Watanabe, Canon Inc. (Japan)
Akira Miyake, Canon Inc. (Japan)
Takashi Iizuka, Canon Inc. (Japan)
Yasuaki Fukuda, Canon Inc. (Japan)
Yoshiaki Kato, Osaka Univ. (Japan)
Hiroyuki Shiraga, Osaka Univ. (Japan)
Hiroyuki Daido, Osaka Univ. (Japan)
Kensuki Murai, Osaka Univ. (Japan)
Ciaran L. S. Lewis, Queen's Univ. of Belfast (United Kingdom)
David Neely, Queen's Univ. of Belfast (United Kingdom)
Domhnail O'Neill, Queen's Univ. of Belfast (United Kingdom)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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