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Proceedings Paper

Fabrication and evaluation of Cr-C multilayer mirrors for soft x rays
Author(s): Masahito Niibe; Masami Tsukamoto; Takashi Iizuka; Akira Miyake; Yutaka Watanabe; Yasuaki Fukuda
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Paper Abstract

We have selected Cr and C as a material pair of multilayer (ML) mirrors for soft x rays at the wavelength near 5 nm. The Cr-C ML structures have successfully been fabricated with rf- magnetron sputtering. The ML structures have been characterized with transmission electron microscopy (TEM), x-ray diffraction, and reflectivity measurement by SR light. From the observation of TEM images, Cr-C MLs had uniform and less-defective layered structures with the d-spacing down to 2.4 nm. Reflectivities at normal and grazing incidence were remarkably decreased with decreasing the ML d-spacing. Normal incidence reflectivity at 5 nm was as high as 7%. The regularity of the d-spacing of the MLs was evaluated with a moire image that was formed by putting a reference stripe pattern on the cross-sectional TEM micrograph. Compared to Ni-C MLs, Cr-C is a preferable material combination for x-ray mirrors for shorter wavelength and normal incidence.

Paper Details

Date Published: 20 October 1992
PDF: 9 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132127
Show Author Affiliations
Masahito Niibe, Canon Inc. (Japan)
Masami Tsukamoto, Canon Inc. (Japan)
Takashi Iizuka, Canon Inc. (Japan)
Akira Miyake, Canon Inc. (Japan)
Yutaka Watanabe, Canon Inc. (Japan)
Yasuaki Fukuda, Canon Inc. (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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