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Proceedings Paper

Scattering characteristics of dielectric optical multilayers in visible region
Author(s): Takayuki Akiyama
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Paper Abstract

A scattering measurement apparatus equipped with a halogen lamp and an integrating sphere was constructed. The scattering characteristics of ZrO2/SiO2 multilayers were measured in the visible region. The scattering characteristics did not only follow (lambda) -4 relation but also depended on the optical characteristics. It was shown that the electric field intensity distributions qualitatively explained the scattering characteristics. Also, the apparatus was useful as an instrument to find out the optimum deposition conditions of multilayers.

Paper Details

Date Published: 20 October 1992
PDF: 12 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132121
Show Author Affiliations
Takayuki Akiyama, Nikon Corp. (Japan)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
Jumpei Tsujiuchi, Editor(s)

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