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Proceedings Paper

Phase-shifting common-path interferometers using double-focus lenses for surface profiling
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Paper Abstract

Interferometers have come to be used in production processes for surface profiling. Common- path interferometers are becoming important because they are insensitive to environmental disturbances such as mechanical vibration, air turbulence, and thermal drift. Among common- path interferometers, those using double-focus lens are promising because they can easily incorporate phase-shifting technique. In this paper, common-path interferometers using double-focus lenses are described and some experimental results are given. Properties of double focus lenses are investigated and their effect on surface profiling is discussed.

Paper Details

Date Published: 20 October 1992
PDF: 9 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132120
Show Author Affiliations
Hisao Kikuta, Univ. of Osaka Prefecture (Japan)
Koichi Iwata, Univ. of Osaka Prefecture (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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