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Proceedings Paper

Noncontact measuring methods of optical surface roughness
Author(s): Feng Liang; Tianning Cao
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Paper Abstract

This paper discusses some non-contact measuring methods of optical surface roughness. Three types of optical interference profilometers researched in China are mentioned. Some unique techniques used in them are introduced. The advantages and disadvantages of them for on-line measuring are discussed.

Paper Details

Date Published: 20 October 1992
PDF: 6 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132115
Show Author Affiliations
Feng Liang, Zhejiang Univ. (China)
Tianning Cao, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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