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Proceedings Paper

Real-time surface roughness measurement under speckle pattern illumination
Author(s): Kiyoshi Nakagawa; Takeaki Yoshimura; Takumi Minemoto
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Paper Abstract

A useful and excellent method to measure the surface roughness in a real time has been proposed and investigated. In the method, the real-time Fourier transformation of doubly scattered speckle pattern is used.

Paper Details

Date Published: 20 October 1992
PDF: 10 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132114
Show Author Affiliations
Kiyoshi Nakagawa, Kobe Univ. (Japan)
Takeaki Yoshimura, Kobe Univ. (Japan)
Takumi Minemoto, Kobe Univ. (Japan)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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