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Proceedings Paper

Development of new instrument detecting integrated intensity fluctuations for surface roughness measurements
Author(s): Eiichi Miyazaki; Kunifumi Nakanishi; Takeaki Yoshimura
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Paper Abstract

A new method to measure the surface roughness under a fully developed speckle pattern illumination has been proposed. This technique is used on the basis that the roughness depends on the speckle size of doubly scattered light and the size can be determined from the spatial fluctuations of the integrated intensity over a finite area. Using the CCD camera as a photodetector, the proposed system can determine the roughness at on-line.

Paper Details

Date Published: 20 October 1992
PDF: 8 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132113
Show Author Affiliations
Eiichi Miyazaki, Kobe Univ. (Japan)
Kunifumi Nakanishi, Kobe Univ. (Japan)
Takeaki Yoshimura, Kobe Univ. (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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